I-Plasma Etcher Amandla abonakalisiwe

Plasma Etcher Power Basics
Amandla e-plasma etcher afana ne-accelerator yemoto, ichaza ngokuthe ngqo isantya kunye nobunzulu be-etching. Okukhona amandla aphezulu, kokukhona ukuxinana okukhulu kweplasma kunye nokukhawuleza kwesantya sokutsala. Noko ke, amandla aphakamileyo akasoloko ebhetele; kufuneka ilungiswe ngokusekelwe kwizinto eziphathekayo kunye neemfuno zenkqubo.

Amandla aphantsi (i-100-300W): Ifanelekile ukubethelwa kakuhle kunye nokunciphisa umonakalo wezinto eziphathekayo.

Amandla aphakathi (300-600W): Ibhalansi ye-etch rate kunye nokukhetha.

Amandla aphezulu (600W nangaphezulu): Isetyenziselwa ukususwa ngokukhawuleza kwezinto ezininzi.

Impembelelo yaMandla kwiZiphumo ze-Etching

Utshintsho oluncinci kumandla lunokukhokelela kumahluko omkhulu kwiziphumo ze-etching:

Izinga le-Etching: Ngalinye i-100W yokunyuka kwamandla kwandisa izinga malunga ne-15-20%.

Ukukhetha: Amandla agqithisileyo anokunciphisa ukukhuselwa kwemaski.

Ukufana: Ukuguquguquka kwamandla kunokukhokelela kubunzulu obungahambelaniyo be-etching.

Byproducts: Amandla achaphazela i-plasma chemistry, ukutshintsha iintlobo zeproduct.

Imiba ePhambili kuLungiso lwaMandla

Ukufumana iziphumo ezigqwesileyo zokurhweba, ezi zinto zilandelayo kufuneka ziqwalaselwe:

Uhlobo lwegesi: Iigesi ezahlukeneyo zifuna uluhlu oluthile lwamandla.

Uxinzelelo lwegumbi: Utshintsho loxinzelelo lufuna ukulungiswa kwamandla okuhambelanayo.

Ubushushu be-substrate: Amandla anokwehliswa njengoko ubushushu bunyuka.

Isithuba se-Electrode: Okukhona sisincinci isithuba, kokukhona sisezantsi amandla afunekayo.