Ukusetyenziswa okuthe ngqo kweZicoci zePlasma

Ukucoca i-Plasma / oomatshini be-etching bavelisa i-plasma ngokubeka i-electrode ezimbini kwisitya esitywiniweyo ukudala indawo yombane. Impompo yokufunxa isetyenziselwa ukugcina inqanaba elithile levacuum. Njengoko irhasi iya inqabile, umgama phakathi kweeamolekyu kunye nokuhamba ngokukhululekileyo kweemolekyuli okanye iiyoni nazo ziyanda. Ngaphantsi kwefuthe lentsimi yombane, ezi ion ziyangqubana kwaye zenze iplasma. Ezi ion zisebenza kakhulu, zinamandla aneleyo okuqhawula phantse zonke iibhondi zeekhemikhali, zibangela ukusabela kweekhemikhali kuwo nawuphi na umphezulu ovelileyo. Iiplasma zegesi ezahlukeneyo zineempawu zeekhemikhali ezahlukeneyo. Ngokomzekelo, i-oxygen plasma i-oxidizing kakhulu, ikwazi ukwenza i-photoresist i-oxidizing ukuvelisa igesi, ngaloo ndlela ifezekisa umphumo wokucoca. I-Plasma yegesi ebolileyo ine-anisotropy egqwesileyo, ehlangabezana neemfuno ze-etching. Unyango lwe-Plasma luvelisa ukukhanya, ngenxa yoko igama lokukhutshwa kokukhanya.
Indlela yokucoca i-plasma ixhomekeke ngokukodwa "kwi-activation" yamasuntswana asebenzayo kwi-plasma ukususa amabala angaphezulu. Ngokubhekiselele kwindlela yokusabela, ukucocwa kweplasma ngokubanzi kubandakanya le nkqubo ilandelayo: iigesi ezingabonakaliyo ziyavuya kwi-plasma state; izinto zegesi zibhengezwa kumphezulu oqinileyo; amaqela e-adsorbed asabela kunye neemolekyuli kwindawo eqinileyo ukwenza iimolekyuli zemveliso; iimolekyuli zemveliso zibola kwisigaba segesi; kwaye iintsalela reaction ziyasuswa kumphezulu.

Eyona nto ibalulekileyo yeteknoloji yokucoca iplasma kukuba inokuphatha naluphi na uhlobo lwe-substrate, kubandakanywa isinyithi, i-semiconductors, i-oxides, kunye nezinto ezininzi ze-polymer ezifana ne-polypropylene, i-polyester, i-polyimide, i-polyvinyl chloride, i-epoxy, kunye ne-polytetrafluoroethylene. Iyakwazi ukuhlambulula yonke indawo kunye neendawo ezithile, kunye nezakhiwo ezinzima.