LCD RF Plasma Izixhobo

I-LCD RF Plasma Equipment yinkqubo{0}}ephezulu yokusebenza ephuhliswe kunyango lomphezulu we-LCD, i-OLED, kunye nezinye imathiriyeli yokubonisa ipaneli ecaba. Yenzelwe ukuhlangabezana neemfuno ezingqongqo zemveliso yanamhlanje, apho ukusetyenzwa okuzinzileyo kunye nomthamo ophezulu wemveliso zibaluleke ngokulinganayo. Inkqubo iyonke ilinganisa i-880mm × 790mm × 1710mm, kunye nobungakanani begumbi lokufunxa le-450mm × 450mm × 450mm. Ipleyiti nganye ye-electrode yi-410mm × 430mm, kwaye ukuya kuthi ga kwimigangatho emihlanu ye-substrates inokucutshungulwa ngaxeshanye kumjikelo omnye.

 

Ngokwembono yokusebenza, isixhobo sibonelela ngomsebenzisi-olungele i-HMI evumela uhlengahlengiso oluthe ngqo kwiiparamitha zenkqubo ezingundoqo ezifana namandla aphumayo eRF, ubude bexesha lokumpompa, amacandelo onyango lomntu ngamnye, kunye namazinga okuqukuqela kwerhasi. Ezi zicwangciso zinokutshintshwa ngokukhawuleza ukuze zihambelane nezixhobo ezahlukeneyo okanye iimfuno zenkqubo, zinika zombini ukuguquguquka kunye nokuhambelana kwemisebenzi yoshishino.

Inkqubo yokuhanjiswa kwegesi isekela iziteshi ezintathu ezizimeleyo kwaye inokusingatha i-nitrogen (N₂), i-argon (Ar), i-hydrogen (H₂), kunye ne-oxygen (O₂). Iimitha ezihambayo zilinganiswe ngaphakathi kwe-0-200 ml / min uluhlu, ngokuchaneka kokulawula ukugcina ukuguquguquka ngaphantsi kwe-5%. Onke amacandelo amakhulu omoya abonelelwa yi-SMC, kwaye ukutywinwa kwegumbi kuxhomekeke kwi-fluoro ehlala ixesha elide{5}}igaskithi zerabha, iqinisekisa{6}}uzinzo lwexesha elide kwiindawo ezibangwayo. IPlasma iveliswa-ngobonelelo lwamandla lweRF oluziqhelanisayo olusebenza kwi-13.56 MHz, olunomthamo omkhulu we-1 kW, oqinisekisa ukuhanjiswa kwamandla athembekileyo kunyango olufanayo.

Ngokwesakhiwo, igumbi lenziwe ukusuka kwintsimbi ephezulu -ecocekileyo ye-304 engenakutyiwa ukuze kuncitshiswe i-oxidation kunye nokuhlwa. Inkqubo isebenzisa idizayini ephindwe kabini-yetywina loyilo lokufunxa ingqibelelo, ngelixa abaphethe i-electrode yobhedu ngasemva kwegumbi bekhusela iipleyiti ze-electrode ezithe tyaba ngezitshixo ezininzi, ukuphucula uzinzo kunye nokudluliselwa kwamandla. Icala elongezelelweyo lixhasa ukuqinisa ngakumbi i-electrodes. Ibhalansi ye-vacuum yenziwe yaphuculwa: ivalve yokukhupha ngokukhawuleza - ivumela ukulingana koxinzelelo phakathi kwe-5-10 imizuzwana, ukunciphisa ixesha elingasebenziyo kunye nokunyusa imveliso.

Ukuqinisekisa ukhuseleko lokusebenza, umatshini uxhotyiswe nge-alarm alarm system. Ibhala umhla, ixesha, kunye nonobangela waso nasiphi na isiganeko esingaqhelekanga, ngelixa ukuvalwa okuzenzekelayo kubangelwa ukukhusela zombini igumbi kunye nezixhobo zokusebenza.

Ngokwesicelo, esi sixhobo samkelwa ngokubanzi kwiflip{0}}iinkqubo zokuzaliswa kwe-chip. Ukucocwa kwePlasma ngaphambi kokuzaliswa ngaphantsi kokunyusa kakhulu ukusebenza komphezulu, kuphucula ukumanzi, kunye nokwandisa ukunamathela phakathi kwe-substrate kunye ne-encapsulant. Ngenxa yoko, ayiphuculi kuphela umgangatho wokupakisha kodwa iphucula{3}}ukuthembeka kwexesha elide lomboniso ophambili kunye nesemiconductor assemblies.

Iifayile ezishisayo: lcd rf izixhobo zeplasma, China lcd rf abavelisi bezixhobo zeplasma, umzi-mveliso